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Pumps: Vacuum

Used Miscellaneous Titanium Sublimation Pump

Inventory Number: 35993
Now (USD): $1,250.00

Older system, fair condition. Top Flange: 14-5/8 in. O.D., 11-5/8 in. I.D., 32 holes 13-5/8 in. on center. Bottom Flange: 7-13/16 in. O.D., 5-15/16 in. I.D., 20 holes 7-1/8 in. on center.

Product Details

Used Mykrolis Pump

Inventory Number: 58437
Now (USD): $450.00

Photoresist Pump.

Product Details

Used NRC Varian VHS-250

Inventory Number: 61493
Now (USD): $2,250.00

Diffusion Pump. Model 0178. Pumping Speed: 2125 l/s air. Inlet Flange: ISO 250F bolted O-ring seal. 240V heater.

Product Details

Used Osaka Vacuum TG-1810

Inventory Number: 51816
Now (USD): $4,950.00

Turbo Pump. Pump only, no controller. Volume Flow Rate: 1800 l/s. 10 in. ID ISO flange.

Product Details

Used Pfeiffer TPU-330

Inventory Number: 58184
Now (USD): $4,500.00

Turbomolecular Pump. Turbo pump only, no cables or controller. Unit was in stock spare, never used. Inlet Flange: 100CF. Pumping Speed: 300 l/s.

Product Details

Used Pfeiffer TMU 65 U-SG

Inventory Number: 58429
Now (USD): $1,500.00

Turbomolecular Drag Pump. High compression ratio and high tolerance forepressure. Pump only, no cable or power supply. Pumping Speed: 56 l/s.

Product Details

Used Pfeiffer TMH 1600PC

Inventory Number: 60630
Now (USD): $17,000.00

Rebuilt Turbo Pump with Controller. Will be sent out for rebuild once order is received. Turbomolecular drag pump high compression ratio and allowable forepressure for lower vacuum system costs. Pumping Speed: N2 1100 l/s. DN-200 ISO flange. 110-220V, 50/60 Hz, 15A, CE.  4 Available.

Product Details

Used Pfeiffer TMH 1600C

Inventory Number: 60927
Now (USD): $17,000.00

Rebuilt Turbo Pump with Controller. Will be sent out for rebuild once order is received. Turbomolecular drag pump high compression ratio and allowable forepressure for lower vacuum system costs. Pumping Speed: N2 1100 l/s. DN-200 ISO flange. 110-220V, 50/60 Hz, 15A, CE. 2 Available.

Product Details

Used Pfeiffer TSH 064D

Inventory Number: 61117
Now (USD): $4,950.00

Turbo Pumping Station. Turbomolecular drag pump with dry diaphragm backing pump. Pumping Speed: 30 l/s. 110-115V, 1 Ph, 50/60 Hz, 5A.

Product Details

Used Pfeiffer TPH 040

Inventory Number: 61292
Now (USD): $1,750.00

Turbo Pump and Controller. ISO flange 3-3/4 in. OD. TCP 121 controller. 100-240V, 50/60 Hz, 3A.

Product Details