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Power Supplies - RF-Plasma-E-Gun

Used ENI LPI-10

Inventory Number: 52649
Now (USD): $3,500.00

Linear Pulsed Amplifier. Frequency Range: 10 - 86 MHz. Output Power: 1000W. Gain: 60 dB with gain flatness +/-1 dB.

Product Details

Used ENI Polara-260A

Inventory Number: 53297
Now (USD): $1,250.00

Pulsed Bipolar Power Supply. Power: 3 kW. P/N 260-01. Customer Part No.: 0190-01428. 208V, 3 Ph, 50/60 Hz, 30A, CE.

Product Details

Used ENI Polara-260A

Inventory Number: 53301
Now (USD): $1,250.00

Pulsed Bipolar Power Supply for Semiconductor Electroplating Applications. Power: 3 kW. Software modified Ver. 1.2 Test A. 208V, 3 Ph, 50/60 Hz, 30A.

Product Details

Used ENI VL-400 M2

Inventory Number: 53848
Now (USD): $1,250.00

Phase Shift Controller. Designed for use with OEM or ACG Series plasma generators. Provides additional flexibility for controlling RF power in plasma etching and sputtering applications at 13.56 MHz. The VL-400 is capable of producing up to three fixed-phase 13.56 MHz outputs and one additional phase shifted output. The phase shifted output can be varied from 0 to 500 degrees with respect to the fixed phase outputs.

Product Details

Used ENI LPG-1A-000-51

Inventory Number: 55603
Now (USD): $1,250.00

100 KHz 50W RF Generator. 50W RF output. Operating Frequency: 100 KHz. Water cooled. 208V, 1 Ph, 60 Hz.

Product Details

Used ENI OEM-12A-6

Inventory Number: 57452
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-12A-21041-51

Inventory Number: 57458
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-12A-AM

Inventory Number: 57462
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-12J

Inventory Number: 57465
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-50N-11601

Inventory Number: 60286
Now (USD): $2,950.00

13.56 MHz 5000W RF Plasma Generator. Previously used for Novellus system. Solid state rugged RF generator. Automatic forward power leveling. Pulsed operation. Output Frequency: 13.56 MHz with a maximum 5000W. Water cooled. 208V, 3 Ph, 50/60 Hz, 40A.

Product Details