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Power Supplies - RF-Plasma-E-Gun

Used ENI DCG-200Z

Inventory Number: 43991
Now (USD): $1,950.00

Reactive Sputtering Power Supply. For reactive sputtering processes in which arcing is unavoidable, the low level arc energy and high arc sensitivity have important benefits. System output 20 kW. 380/480V, 3 Ph, 50/60 Hz.

Product Details

Used ENI EGR9600B

Inventory Number: 51643
Now (USD): $2,950.00

Power Generator. Can supply up to 9000W of power over a frequency range of 8 to 111 kHz. 50 ohm output impedance.

Product Details

Used ENI LPI-10

Inventory Number: 52649
Now (USD): $3,500.00

Linear Pulsed Amplifier. Frequency Range: 10 - 86 MHz. Output Power: 1000W. Gain: 60 dB with gain flatness +/-1 dB.

Product Details

Used ENI Polara-260A

Inventory Number: 53297
Now (USD): $1,250.00

Pulsed Bipolar Power Supply. Power: 3 kW. P/N 260-01. Customer Part No.: 0190-01428. 208V, 3 Ph, 50/60 Hz, 30A, CE.

Product Details

Used ENI Polara-260A

Inventory Number: 53301
Now (USD): $1,250.00

Pulsed Bipolar Power Supply for Semiconductor Electroplating Applications. Power: 3 kW. Software modified Ver. 1.2 Test A. 208V, 3 Ph, 50/60 Hz, 30A.

Product Details

Used ENI VL-400 M2

Inventory Number: 53848
Now (USD): $1,250.00

Phase Shift Controller. Designed for use with OEM or ACG Series plasma generators. Provides additional flexibility for controlling RF power in plasma etching and sputtering applications at 13.56 MHz. The VL-400 is capable of producing up to three fixed-phase 13.56 MHz outputs and one additional phase shifted output. The phase shifted output can be varied from 0 to 500 degrees with respect to the fixed phase outputs.

Product Details

Used ENI LPG-1A-000-51

Inventory Number: 55603
Now (USD): $1,250.00

100 KHz 50W RF Generator. 50W RF output. Operating Frequency: 100 KHz. Water cooled. 208V, 1 Ph, 60 Hz.

Product Details

Used ENI OEM-12A-6

Inventory Number: 57452
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-12A-21041-51

Inventory Number: 57458
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-12A-AM

Inventory Number: 57462
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details