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Photoresist: Coaters - Tracks

Used Laurell WS-400B-6NPP/LITE

Inventory Number: 61001
Now (USD): $2,750.00

Photoresist Spinner. Made with materials that do not degrade or generate particles. The bowl shaped interior forces fluid downward where it is routed directly to rear drain. The upper plenum closes inside the base providing an overlapping seal. A proprietary motor seal protects the motor and control electronics from chemical containment. WS-400/500 digital process controller has 25 programs. Max. RPM: 6000. Process Chamber: 8.5 in. 95-240V, 50/60 Hz, CE.

Product Details

Used Laurell WS-400B-6NPP/LITE

Inventory Number: 61003
Now (USD): $2,750.00

Photoresist Spinner. Made with materials that do not degrade or generate particles. The bowl shaped interior forces fluid downward where it is routed directly to rear drain. The upper plenum closes inside the base providing an overlapping seal. A proprietary motor seal protects the motor and control electronics from chemical containment. WS-400/500 digital process controller has 25 programs. Max. RPM: 6000. Process Chamber: 8.5 in. 95-240V, 50/60 Hz, CE.

Product Details

Used Laurell WS-650SZ-6NPP/A1/AR1

Inventory Number: 61450
Now (USD): $3,950.00

Photoresist Spin Coater. Chamber: 7.5 in. dia. inside. Controller allows operator interaction in real time during the process execution including pausing time, stopping and continuing on from that point. The closed bowl design allows most coating materials to dry in a quiescent state, increasing uniformity and minimizing particle contamination. 94-240V, 50/60 Hz, CE.

Product Details

Used MTI Multifab S3

Inventory Number: 51541
Now (USD): $750.00

Photoresist Coating Track System. Wafer is transferred from elevator to bake and spin coat modules via robotic arm. All process parameters are programmed on the system monitor using a light pen. Sold As Is.

Product Details

Used MTI S3 Flexifab Parts System

Inventory Number: 51548
Now (USD): $1,450.00

S3 Photoresist Coating System. Parts system only. Includes spin, elevator and control units. Missing some parts. Call for detailed photos.

Product Details

Used Semiconductor Systems PBCS31/3

Inventory Number: 26885
Now (USD): $950.00

Dual Track System Coat and Develop. Can be configured to process wafers from 3 in. to 6 in. in dia. Track no. 1 Cassette - Bake - Coat - Bake - Cassette. Track no. 2 Cassette - Bake - Coat - Bake - Cassette. Sold AS IS.

Product Details

Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

Product Details

Used Solitec 5110-C

Inventory Number: 60108
Now (USD): $7,500.00

Photoresist Spinner Coater. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110 (8mm)

Inventory Number: 60427
Now (USD): $7,500.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110-SJ

Inventory Number: 60624
Now (USD): $5,250.00

High Pressure DI Water Substrate and Mask Cleaning System. Chucks for 5 in. x 5 in. or 6 in. x 6 in. squares. Substrate rotates as high pressure DI water removes particulates. Nitrogen blow off for drying.

Product Details