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Photoresist: Coaters - Tracks

Used Solitec 5110-C

Inventory Number: 60108
Now (USD): $4,500.00

Photoresist Spinner Coater. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110 (8mm)

Inventory Number: 60427
Now (USD): $4,500.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110-SJ

Inventory Number: 60624
Now (USD): $5,250.00

High Pressure DI Water Substrate and Mask Cleaning System. Chucks for 5 in. x 5 in. or 6 in. x 6 in. squares. Substrate rotates as high pressure DI water removes particulates. Nitrogen blow off for drying.

Product Details

Used Solitec 5110

Inventory Number: 61829
Now (USD): $3,950.00

Single Head Wafer Processing Photoresist Spin Coater. Designed to coat wafers, masks and substrates. Simple design for low maintenance easy serviceability and high up-timer. Acceleration 1,000 to 40,000 rpm/sec. Digital display/timer with manual programming. Capable of 9 in. round, 6 in. square or 9 in. diagonal for rectangular substrate. 120V. Does not include resist dispense pump or parts.

Product Details

Used Solitec 5110-C-T

Inventory Number: 61856
Now (USD): $3,950.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process Sequence: Resist, spread, spin. Able to accommodate substrates up to 9 in. round or 6 in. square. 120V.

Product Details

Used Specialty Coating Systems PDS-2010

Inventory Number: 56987
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR SPECIALTY COATING SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Portable Parylene. Deposition System. Designed for deposition of protective parylene conformal coating. Small 12 in. dia. chamber. Includes vacuum pump.

Product Details

Used Specialty Coating Systems G3P-12

Inventory Number: 60959
Now (USD): $4,950.00

Precision Photoresist Spin Coater. Programmable model store and execute up to 30 programs with 20 steps each which are easily entered on the front panel LCD display and keypad. Rotational Speed: 0 to 9,999 rpm. Acceleration: 0.1 to 25.5 sec. 12-inch diameter bowl. 115V, 60 Hz.

Product Details

Used SVG 90S

Inventory Number: 60611
Now (USD): $90,000.00

Vapor Prime/Coat Track System.  SVG Model 90S Clean Track System. 2 Coat, 2 Vapor Prime and 2 Develop modules and associated hot and cold bake plates, Cybor photoresist pumps. Chemical cabinet (D250085) with 6 chemicals - 3 photoresists, 1 developer, 1 HMDS and 1 EBR. Temperature and Humidity Control cabinet (D250086). General Precision Humidity Controller to monitor and control 2 coat and 2 develop modules. Ethylene glycol cabinet for temperature control on plate modules. Sold As Is.

Product Details

Used SVG 8826-8836

Inventory Number: 60931
Now (USD): $10,000.00

88 Series Photoresist Coater. Single track photoresist coater, two elevators, two robots, one spinner and one hot plate. Sold As Parts missing one robot.

Product Details

Used SVG Rite Track 8826-28-36

Inventory Number: 60930
Now (USD): $35,000.00

88 Series Dual Track Photoresist Coater and Developer. Fully automated system designed to uniformly coat wafers. Configuration - Track 1: Elevator, Robot, Spinner, Robot, Hot Plate, Robot, Elevator. Track 2: Elevator, Robot, Hot Plate, Robot, Chill Plate, Robot, Spinner, Robot, Elevator.  Controls - SVG-8826 SMC/8836HPO Coater, RT 8828/8836 HPO Developer, Two Rite Track digital temperature controllers TC1000. Does not include photoresist pumps or developer tanks.

Product Details