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Photoresist: Coaters - Tracks

Used MTI Multifab S3

Inventory Number: 51541
Now (USD): $750.00

Photoresist Coating Track System. Wafer is transferred from elevator to bake and spin coat modules via robotic arm. All process parameters are programmed on the system monitor using a light pen. Sold As Is.

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Used MTI S3 Flexifab Parts System

Inventory Number: 51548
Now (USD): $1,450.00

S3 Photoresist Coating System. Parts system only. Includes spin, elevator and control units. Missing some parts. Call for detailed photos.

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Used Semiconductor Systems PBCS31/3

Inventory Number: 26885
Now (USD): $950.00

Dual Track System Coat and Develop. Can be configured to process wafers from 3 in. to 6 in. in dia. Track no. 1 Cassette - Bake - Coat - Bake - Cassette. Track no. 2 Cassette - Bake - Coat - Bake - Cassette. Sold AS IS.

Product Details

Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

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Used Solitec 5110-C

Inventory Number: 60108
Now (USD): $5,250.00

Photoresist Spinner Coater. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

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Used Solitec 5110 (8mm)

Inventory Number: 60427
Now (USD): $5,250.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

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Used Solitec 5110-SJ

Inventory Number: 60624
Now (USD): $5,250.00

High Pressure DI Water Substrate and Mask Cleaning System. Chucks for 5 in. x 5 in. or 6 in. x 6 in. squares. Substrate rotates as high pressure DI water removes particulates. Nitrogen blow off for drying.

Product Details

Used Specialty Coating Systems PDS-2010

Inventory Number: 56987
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR SPECIALTY COATING SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Portable Parylene. Deposition System. Designed for deposition of protective parylene conformal coating. Small 12 in. dia. chamber. Includes vacuum pump.

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Used Specialty Coating Systems G3P-12

Inventory Number: 60959
Now (USD): $4,950.00

Precision Photoresist Spin Coater. Programmable model store and execute up to 30 programs with 20 steps each which are easily entered on the front panel LCD display and keypad. Rotational Speed: 0 to 9,999 rpm. Acceleration: 0.1 to 25.5 sec. 12-inch diameter bowl. 115V, 60 Hz.

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Used Specialty Coating Systems PDS 2010

Inventory Number: 61656
Now (USD): $21,500.00

Parylene Coating System with Chiller. Specialty Coating Systems portable parylene deposition system. Automatic operation, PLC control in auto mode the system pumps down to a preset pressure and the furnace cycles up to operating temperature. When proper temperature and pressure are established the vaporizer begins parylene sublimation. 12 in. dia. x 12 in. H stainless steel chamber. Substrate rotation plate. Includes mechanical chiller to eliminate the need for liquid nitrogen.

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