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Photoresist: Coaters - Tracks

Used Headway Research CB-15

Inventory Number: 55891
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR HEADWAY RESEARCH SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Photoresist Spinner. Capable of spinning up to 9 in. dia. substrates. EC101-D controller. 15 in. dia. bowl. RPM Range: 50 to 10,000. Acceleration: 0.25 sec. to 1.25 sec. 115V, 50/60 Hz, 3A.

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Used Headway Research PWM32-PS-R790

Inventory Number: 60114
Now (USD): $4,250.00

Photoresist Spinner with Digital Programmable Controller. Mounted in a Headway cabinet. Up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks. Maximum substrate size up to 5-inch. Does not have dispense pumps or lines. Will need vacuum source for wafer hold-down. 120V, 60 Hz.

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Used Headway Research PWM32-PS-R790

Inventory Number: 60113
Now (USD): $4,250.00

Photoresist Spinner with Digital Programmable Controller. Mounted in a Headway cabinet. Up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks. Maximum substrate size up to 5-inch. Does not have dispense pumps or lines. Will need vacuum source for wafer hold-down. 120V, 60 Hz.

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Used Headway Research PWM32-R790

Inventory Number: 61325
Now (USD): $5,250.00

Photoresist Spinner Mounted in Exhaust Hood Table. Spin coater for substrates up to 5 in. diameter or diagonal. The bowl diameter is 7.9 in. ID. Up to 10,000 rpm for relatively light loads such as silicon wafers or small photomasks. Two HDP98 pump fluid dispensers included at no additional price but these are not tested or part of warranty. PWM32 digital controller. Unit is mounted on a table with a stainless fume hood. 120V, 50/60 Hz, 10A.

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Used IVI Corp. Box Coater

Inventory Number: 57766
Now (USD): $16,000.00

PC controller. Crystal deposition rate controller. Heater power supply, quartz lamps inside. Resistance power supply. Inside Dimensions: 27 in. L x 27 in. D x 30 in. H. System does not have cryo or roughing pumps. Sold As Is, not complete.

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Used Karl Suss RC8-MS3

Inventory Number: 60633
Now (USD): $8,500.00

Photoresist Spinner. Unique design provides a better uniformity than conventional spin coaters. Reduces resist consumption by up to 50 percent. Fully programmable process parameters. Handles up to 8 in. round substrates. (Depends on chuck installed). 110V, 60 Hz, CE.

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Used Laurell Spinner

Inventory Number: 55123
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR LAURELL SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Digital readouts. Manual controls. Max. Speed: 2400 rpm. No load. 12 in. dia. bowl. Custom top cover. 115V, 60 Hz.

Product Details

Used Laurell WS-500-8TFM

Inventory Number: 60386
Now (USD): $12,000.00

WS-500 Series Spin Processor Developing Station for up to 200mm Wafers. Process spinner. For cleaning, etching, developing processes on wafers up to 200mm. Features a locked, counter balanced, clear dome chamber for a protected view of the process without exposure to vapors or chemicals. Mounted in a Bettcher RA36FRPP wet bench. Up to 20 fifty step programs can be stored in the controller. 120V, 60 Hz.

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Used Laurell WS-400B-6NPP/LITE

Inventory Number: 60969
Now (USD): $2,750.00

Photoresist Spinner. Made with materials that do not degrade or generate particles. The bowl shaped interior forces fluid downward where it is routed directly to rear drain. The upper plenum closes inside the base providing an overlapping seal. A proprietary motor seal protects the motor and control electronics from chemical containment. WS-400/500 digital process controller has 25 programs. Max. RPM: 6000. Process Chamber: 8.5 in. 95-240V, 50/60 Hz, CE.

Product Details

Used Laurell WS-400B-6NPP/LITE

Inventory Number: 60985
Now (USD): $2,750.00

Photoresist Spinner. Made with materials that do not degrade or generate particles. The bowl shaped interior forces fluid downward where it is routed directly to rear drain. The upper plenum closes inside the base providing an overlapping seal. A proprietary motor seal protects the motor and control electronics from chemical containment. WS-400/500 digital process controller has 25 programs. Max. RPM: 6000. Process Chamber: 8.5 in. 95-240V, 50/60 Hz, CE.

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