Category Feed Subscribe to this Channel's RSS Feed

Cleaning Systems

Used Uvocs T10X10/OES/W

Inventory Number: 55093
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR UVOCS SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Ultraviolet Ozone Cleaning System with Bottom Up Lighting Configured for 4 in. Wafers. This version has the UV lights on the bottom and the tray has cut outs for 4 in. dia. substrates. Fast method for obtaining ultra-clean surfaces free of organic contaminants. 10 in. x 10 in. source size. Ozone exhaust shroud. 115V, 60 Hz, 2.5A.

Product Details

Used Uvocs T16X16/OES/E

Inventory Number: 47382
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR UVOCS SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Ultraviolet-Ozone Cleaning System. Cleaning or oxidation with the UVOCS is accomplished by the combination of ultraviolet light and ozone. Low pressure quartz-mercury vapor lamp which generates UV emissions inthe 254 and 185 nanometer range. Source Size: 16 in. x 16 in. Active Area: 256 sq. in. Width: 20 in. Depth: 29-3/4 in. Height: 14-1/2 in. 110 V, 60 Hz, 5.0A.

Product Details

Used Verteq GFM-CMP-200M-G2L-E0

Inventory Number: 58154
Now (USD): $29,000.00

Goldfinger Megasonic Single Wafer Cleaning System. Megasonic sound waves are used to scrub surfaces clean of particles and contamination. System is controlled and operated using a LCD handheld pendant. System removes residue from advanced semiconductor devices with design rules below 130nm without damaging gate stacks, bit lines or vulnerable thin films. Comes with wafer holder for 4 in., 6 in. and 8 in. wafers. Manual loading. 120V, 50/60 Hz, 21A.

Product Details

Used Yieldup Omega 6200

Inventory Number: 52683
Now (USD): $29,000.00

Megasonic Wafer Cleaning System. Robot assist between 2 tanks. Set up for 2 - 200 mm cassettes. Tank 1: 11 in. L x 20 in. W x 15 in. H is a quartz megasonic tank with 3 - 600W KAJO megasonic generators. Tank 2: 12 in. L x 20 in. W x 14 in. H is a YieldUp dryer tank with N2 purge and gas injection capability. Overall Dimensions: 60 in. L x 60 in. W x 88 in. H. Mfg. Date: 12/97.

Product Details